Direct current resistance measurement structure for determining line width and metal thickness variations in surface acoustic wave devices.

Direct current resistance measurement structure for determining line width and metal thickness variations in surface acoustic wave devices.

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Titre: Direct current resistance measurement structure for determining line width and metal thickness variations in surface acoustic wave devices.
Auteur: Calder, Bruce.
Résumé: SAW devices are often designed to act as bandpass filters. The electrical properties of surface acoustic wave (SAW) devices are difficult to measure prior to being wirebonded into packages. Matching difference in SAW devices cause difficulties in obtaining accurate measurement of the centre frequency of the bandpass reponse of unpackaged SAW devices. The variation in centre frequency of SAW devices due to fabrication variation is dependent on the variation of the width and thickness of the metal fingers of the SAW device. The width and thickness of aluminum lines of a surface acoustic wave device can be determined by direct current resistance measurement of a single thickness, two part aluminum structure. The first component is based on the van der Pauw sheet resistance structure. The second component is a direct current line width measurement structure. The direct current resistance structure presented here provides a method for determining the width and thickness of the fingers of the interdigital transducer of a SAW device. From the width and thickness information, the centre frequency and bandwidth of a SAW device can be extrapolated. Both direct current and radio frequency measurements can be made rapidly and reproducibly with the aid of computer automation. An automated system for each type of measurement (direct current and radio frequency) will also be described here.
Date: 1998
URI: http://hdl.handle.net/10393/4298

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